Replication Data for: X-ray photoelectron spectroscopic study of the electronic structure of Co10Fe31B10Mo32Ge8Mn9 high-entropy alloydoi:10.48788/DVUA/XDH5R2DataverseUA2026-06-301Pazukha, Iryna; Pylypenko, Oleksandr; Vorobiov, Serhii; Onufriienko, Oleksandr; Komanický, Vladimír, 2026, "Replication Data for: X-ray photoelectron spectroscopic study of the electronic structure of Co10Fe31B10Mo32Ge8Mn9 high-entropy alloy", https://doi.org/10.48788/DVUA/XDH5R2, DataverseUA, V1Replication Data for: X-ray photoelectron spectroscopic study of the electronic structure of Co10Fe31B10Mo32Ge8Mn9 high-entropy alloydoi:10.48788/DVUA/XDH5R2Pazukha, IrynaPylypenko, OleksandrVorobiov, SerhiiOnufriienko, OleksandrKomanický, Vladimír-09I03-03-V04-003852025.07/0115DataverseUAPazukha, IrynaPazukha, Iryna2026-05-15PhysicsX-ray Photoelectron SpectroscopyElectronic structureX-ray photoelectron spectroscopy (XPS) analysis was performed to determine the chemical composition of Co10Fe31B10Mo32Ge8Mn9 HEA thin films.Spectra – processed experimental spectrumThe high-entropy thin film Co10Fe31B10Mo32Ge8Mn9 (hereafter all compositions are given in atomic percent) was deposited using a magnetron sputtering co-deposition technique from three independent sources in an Orion 8 system (AJA International). The targets used for deposition were Mo78Ge22, Co20Fe60B20, and Mn (target purity 99.99%, AJA International).X-ray photoelectron spectroscopy (XPS) measurements were performed using a high-resolution SPECS PHOIBOS 100/150 spectrometer equipped with an Al anode at 200 W. The base pressure during the measurements was approximately 10-8 mbar. All XPS experiments were performed at room temperature (20 °C). The investigated samples were mounted on a molybdenum sample holder using conductive carbon tape.B1s.jpgX-ray photoelectron B 1s spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegC1s.jpgX-ray photoelectron C 1s spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegCo2p.jpgX-ray photoelectron Co 2p spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegFe2p.jpgX-ray photoelectron Fe 2p spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegGe3d.jpgX-ray photoelectron Ge 3d spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegMn2p.jpgX-ray photoelectron Mn 2p spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegMo3d.jpgX-ray photoelectron Mo 3d spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegO1s.jpgX-ray photoelectron O 1s spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpegTotal spectrum_CoFeBMoGeMn.jpgX-ray photoelectron total spectrum for the Co10Fe31B10Mo32Ge8Mn9 high-entropy alloyimage/jpeg