10.48788/DVUA/DNCEEMPazukha, IrynaIrynaPazukha0000-0001-9410-3024Sumy State UniversityShkurdoda, YuriiYuriiShkurdoda0000-0002-8180-4574Sumy State UniversutyPylypenko, OleksandrOleksandrPylypenko0000-0003-0289-1292Sumy State UniversityKomanický, VladimírVladimírKomanický0000-0001-8649-1987P.J. Šafárik University in KošiceDataverseUA2026Physicscrystal structuretransmission electron microscopydiscontinious metal-insulator multilayersPazukha, IrynaIrynaPazukhaSumy State University2026-03-062026-03-18TEM imageshttps://doi.org/10.1007/s10948-025-07037-z3815828463743480672431379643137964085699430750216447203928212032242137293261240034image/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpeg1.1CC0 1.0The impact of annealing temperature on crystal structure and microstructure of discontinuous meal-insulator multilayers [Fe/SiO2]10/S was studied by the Selected Area Electron Diffraction (SAED) technique and Transmission Electron Microscopy (TEM)A Transmission Electron Microscope (TEM) JEOL 2100F UHR operated at 200kV with a Field Emission Gun (FEG) was used to study the microstructure of discontinuous Fe-SiO2 metal-insulator multilayers. Image characterization was done in scanning/transmission mode employing a bright-field detector. Phase identification was confirmed using Selected Area Electron Diffraction (SAED). The discontinuous multilayer systems [Fe(dFe)/SiO2(3)]n/Sub, where n = 10 is the number of bilayer repeaters, were prepared by sequential magnetron sputtering on the copper mush with a carbon layer. The deposited films were annealed at different temperatures (200 and 400 С) in an Ar+N2(2%) environment using an annealing furnace with a continuous gas flow.The State Programs of the Ministry of Education and Science of Ukraine0224U033036The State Programs of the Ministry of Education and Science of Ukraine0124U003644NATO Program "Science for Peace and Security"G6131