10.48788/DVUA/XDH5R2Pazukha, IrynaIrynaPazukha0000-0001-9410-3024Sumy State UniversityPylypenko, OleksandrOleksandrPylypenko0000-0003-0289-1292Sumy State UniversityVorobiov, SerhiiSerhiiVorobiov0000-0002-5884-3292P.J. Šafárik University in KošiceOnufriienko, OleksandrOleksandrOnufriienko0000-0002-9032-8725P.J. Šafárik University in KošiceKomanický, VladimírVladimírKomanický0000-0001-8649-1987P.J. Šafárik University in KošiceDataverseUA2026PhysicsX-ray Photoelectron SpectroscopyElectronic structurePazukha, IrynaIrynaPazukhaSumy State University2026-05-152026-06-30Spectra – processed experimental spectrum8113659896331315346108104480492713137971215119939567857078image/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpegimage/jpeg1.0CC0 1.0X-ray photoelectron spectroscopy (XPS) analysis was performed to determine the chemical composition of Co10Fe31B10Mo32Ge8Mn9 HEA thin films.The high-entropy thin film Co10Fe31B10Mo32Ge8Mn9 (hereafter all compositions are given in atomic percent) was deposited using a magnetron sputtering co-deposition technique from three independent sources in an Orion 8 system (AJA International). The targets used for deposition were Mo78Ge22, Co20Fe60B20, and Mn (target purity 99.99%, AJA International).X-ray photoelectron spectroscopy (XPS) measurements were performed using a high-resolution SPECS PHOIBOS 100/150 spectrometer equipped with an Al anode at 200 W. The base pressure during the measurements was approximately 10-8 mbar. All XPS experiments were performed at room temperature (20 °C). The investigated samples were mounted on a molybdenum sample holder using conductive carbon tape.EU NextGenerationEU through the Recovery and Resilience Plan for Slovakia09I03-03-V04-00385National Research Foundation of Ukraine2025.07/0115