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Notes
| The high-entropy thin film Co10Fe31B10Mo32Ge8Mn9 (hereafter all compositions are given in atomic percent) was deposited using a magnetron sputtering co-deposition technique from three independent sources in an Orion 8 system (AJA International). The targets used for deposition were Mo78Ge22, Co20Fe60B20, and Mn (target purity 99.99%, AJA International).X-ray photoelectron spectroscopy (XPS) measurements were performed using a high-resolution SPECS PHOIBOS 100/150 spectrometer equipped with an Al anode at 200 W. The base pressure during the measurements was approximately 10-8 mbar. All XPS experiments were performed at room temperature (20 °C). The investigated samples were mounted on a molybdenum sample holder using conductive carbon tape. |